ASTM F26 PDF

Standard Test Methods for Determining the Orientation of a Semiconductive Single Crystal (Withdrawn 2003)

ASTM F26 – Standard Test Methods for Determining the Orientation of a Semiconductive Single Crystal (Withdrawn 2003)

This standard was transferred to SEMI (www.semi.org) May 2003

1.1 These test methods cover techniques for determining the crystallographic orientation of a surface which is roughly parallel to a low-index atomic plane in single crystals used primarily for semiconductor devices.

1.2 Two types of test methods are covered as follows:

1.2.1Test Method A, X-ray Diffraction Orientation- This test method may be used for the orientation of all semiconductive single crystals.

1.2.2Test Method B, Optical Orientation- This test method is limited in application at the present time to elemental semiconductors.

1.3This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.Specific hazard statements are given in Section 6.