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ASTM F1709 PDF
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Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
| Published by | Publication Date | Number of Pages |
| ASTM | 05/01/2016 | 3 |
ASTM F1709 – Standard Specification forHigh Purity Titanium Sputtering Targets for Electronic ThinFilm Applications
1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.
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