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ASTM F1367 PDF
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Standard Specification for Chromium Sputtering Targets for Thin Film Applications (Withdrawn 2020)
| Published by | Publication Date | Number of Pages |
| ASTM | 06/01/2011 | 2 |
ASTM F1367 – Standard Specification for Chromium Sputtering Targets for Thin Film Applications (Withdrawn 2020)
1.1 This specification covers sputtering targets fabricated from chromium metal.
1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
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