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ASTM E673 PDF
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Standard Terminology Relating to Surface Analysis (Withdrawn 2012)
| Published by | Publication Date | Number of Pages |
| ASTM | 12/01/2003 | 10 |
ASTM E673 – Standard Terminology Relating to Surface Analysis (Withdrawn 2012)
1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
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