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ASTM E2734/E2734M PDF
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Standard Specification for Dimensions of Knife-Edge Flanges
| Published by | Publication Date | Number of Pages |
| ASTM | 06/01/2018 | 4 |
ASTM E2734/E2734M – Standard Specification for Dimensions of Knife-Edge Flanges
1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum.
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