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ASTM E1634 PDF
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Standard Guide for Performing Sputter Crater Depth Measurements
| Published by | Publication Date | Number of Pages |
| ASTM | 11/01/2019 | 3 |
ASTM E1634 – Standard Guide forPerforming Sputter Crater Depth Measurements
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.
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