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IEC 62047-21 Ed. 1.0 b PDF
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Semiconductor devices – Micro-electromechanical devices – Part 21: Test method for Poisson's ratio of thin film MEMS materials
| Published by | Publication Date | Number of Pages |
| IEC | 06/19/2014 | 26 |
IEC 62047-21 Ed. 1.0 b – Semiconductor devices – Micro-electromechanical devices – Part 21: Test method for Poisson's ratio of thin film MEMS materials
IEC 62047-21:2014 specifies the determination of Poisson’s ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
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