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IEC 62047-1 Ed. 2.0 b PDF
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Semiconductor devices – Micro-electromechanical devices – Part 1: Terms and definitions
| Published by | Publication Date | Number of Pages |
| IEC | 01/06/2016 | 66 |
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IEC 62047-1 Ed. 2.0 b – Semiconductor devices – Micro-electromechanical devices – Part 1: Terms and definitions
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
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