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IEC 62374 Ed. 1.0 b PDF
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Semiconductor devices – Time dependent dielectric breakdown (TDDB) test for gate dielectric films
| Published by | Publication Date | Number of Pages |
| IEC | 03/29/2007 | 43 |
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IEC 62374 Ed. 1.0 b – Semiconductor devices – Time dependent dielectric breakdown (TDDB) test for gate dielectric films
Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure
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