ASTM F1761 PDF

Standard Test Method for Pass Through Flux of Circular Magnetic Sputtering Targets (Withdrawn 2020)

ASTM F1761 – Standard Test Method for Pass Through Flux of Circular Magnetic Sputtering Targets (Withdrawn 2020)

1.1 This test method covers measuring the dc magnetic field transmitted through a ferromagnetic sputtering target (“pass throughflux“ or “PTF“). In this test method the source magnetic field is in the test target’s circumferential direction.

1.2 Planar disk-shaped targets in the diameter range 5 to 8 in. inclusive (125 to 205 mm inclusive) and of thickness 0.1 to 0.5in. inclusive (2.5 to 13 mm) may be characterized by this procedure.

1.3 This test method is also applicable to targets having an open center, for example, to targets 5-in. outside diameter by 2.5-in.inside diameter by 0.25-in. thick (127-mm outside diameter by 63.5-mm insidediameter by 6.35-mm thick).

1.4 Targets of various diameters and thicknesses are accommodated by suitable fixturing to align the piece under test with thesource magnet mounted in the test fixture. Tooling, covering several populartarget designs is specified in this procedure. Additional target configurationsmay be tested by providing special tooling. When special fixturing is usedall parties concerned with the testing must agree to the test setup.

1.5 The values stated in inch-pound units are to be regarded as standard. The values given in parentheses are mathematical conversions to SI units that are provided for information only and are not considered standard.

1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibilityof the user of this standard to establish appropriate safety and health practicesand determine the applicability of regulatory limitations prior to use.