ASTM F1467 PDF
ASTM F1467 PDF
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ASTM F1467 PDF

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Standard Guide for Use of an X-Ray Tester (almost equal to10 keV Photons) in Ionizing Radiation Effects Testing of Semiconductor Devices and Microcircuits

Published byPublication DateNumber of Pages
ASTM03/01/201818

ASTM F1467 – Standard Guide forUse of an X-Ray Tester (almost equal to10 keV Photons) in IonizingRadiation Effects Testing of Semiconductor Devices and Microcircuits

1.1 This guide covers recommended procedures for the use of X-ray testers (that is, sources with a photon spectrum having 10 keV mean photon energy and 50 keV maximum energy) in testing semiconductor discrete devices and integrated circuits for effects from ionizing radiation.

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