ASTM E1636 PDF

Standard Practice for Analytically Describing Depth-Profile and Linescan-Profile Data by an Extended Logistic Function (Withdrawn 2019)

ASTM E1636 – Standard Practice forAnalytically Describing Depth-Profile and Linescan-ProfileData by an Extended Logistic Function (Withdrawn 2019)

1.1 This practice describes a systematic methodfor analyzing depth-profile and linescan data andfor accurately characterizing the shape of an interface region ortopographic feature. The profile data are described with an appropriateanalytic function, and the parameters of this function define theposition, width, and any asymmetry of the interface or feature. Theuse of this practice is recommended in order that the shapes of compositionprofiles of interfaces or of linescans of topographic features acquiredwith different instruments or techniques can be unambiguously comparedand interpreted.

1.2 This practice is intended to be used fortwo purposes. First, it can be used to describe the shape of depth-profilesobtained at an interface between two dissimilar materials that mightbe measured by common surface-analysis techniques such as Auger electronspectroscopy, secondary-ion mass spectrometry, and X-ray photoelectronspectroscopy. Second, it can be used to describe the shape of linescansacross a detectable topographic feature such as a step or a featureon a surface that might be measured by a surface-analysis technique,scanning electron microscopy, or scanning probe microscopy.The practiceis particularly valuable for determining the position and width ofan interface in a depth profile or of a feature on a surface and inassessments of the width as an indication of the sharpness of theinterface or feature (a characteristic of the material system beingmeasured) or of the achieved depth resolution of the profileor the lateral resolution of the linescan (a characteristic of theparticular analytical technique and instrumentation).

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.4 This standard does not purport to addressall of the safety concerns, if any, associated with its use. It isthe responsibility of the user of this standard to establish appropriatesafety and health practices and determine the applicability of regulatorylimitations prior to use.